The Canadian Semiconductor Science and Technology Conference (CSSTC) started in 1982, when the first meeting of this biennial series, under the name of Canadian Semiconductor Technology Conference (CSTC), was organized in Ottawa by the National Research Council Canada (NRC). The meeting was switched from even to odd years with the 7th CSTC in 1995 to desynchronize with the International Conference on Physics of Semiconductors (ICPS) biennial series. NRC was the main organizer and sponsor for CSTC until 2005. The 13th CSTC was held in Montreal in 2007, followed by the 14th meeting in Hamilton in 2009. For the 15th meeting in Vancouver in 2011, the conference was given its present name of the Canadian Semiconductor Science and Technology Conference (CSSTC) to recognize the growing presence of fundamental research and its importance in driving applications and technology transfer. Following meetings were held in Thunder Bay in 2013 (16th CSSTC), Sherbrooke in 2015 (17th CSSTC), Waterloo in 2017 (18th CSSTC) and Saskatoon in 2019 (19th CSSTC). The 20th CSSTC was held in Montréal in 2023.

The University of Ottawa is honoured to host the 21st CSSTC in its STEM building, August 25-27, 2026.